发明名称 METHOD AND DEVICE FOR LOAD MATCHING
摘要 The impedance of a variable load is matched to the output resistance of an HF generator by performing a first impedance matching for a first load impedance and by performing a second impedance matching for a second load impedance. The first impedance matching is carried out at a first frequency and the second impedance matching is carried out at a second frequency.
申请公布号 US2007194628(A1) 申请公布日期 2007.08.23
申请号 US20070670637 申请日期 2007.02.02
申请人 HUETTINGER ELEKTRONIK GMBH + CO. KG 发明人 KIRCHMEIER THOMAS
分类号 H02J7/00 主分类号 H02J7/00
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