发明名称 GAS EXHAUST APPARATUS
摘要 <p>Provided is a wasted gas exhaust apparatus. The wasted gas exhaust apparatus includes: an inflow member where both ends are opened, a plurality of intakes are disposed on a side surface, and a fixing protrusion and a ring-shaped projection are disposed on an inner circumferential surface; an exhaust member where both ends are opened, a support protrusion is disposed on an outer circumferential surface to be supported by the fixing protrusion, an expanded portion towarding an outside is disposed in its bottom end so that a vent groove connecting to the intakes is disposed between the expanded portion and the ringh-shaped projection of the inflow member, and being connected to the inflow member so as to have a high pressure gas chamber disposed between the inner circumferential surface of the inflow member and the outer circumferential surface of the expanded portion; an extended member fitting into an upper portion of the exhaust member and having ten to twelve guide grooves titled with a tilt angle of 9°to 1 1°and disposed in a vertical direction on the inner circumferential surface; an external cover connected to and spaced apart from the exhaust member and forming a heat chamber; an electric heat device disposed within the heat chamber and having a housing in which a heat coil is wound; a temperature sensing unit controlling a temperature of the electric heat device; a protection cover disposed outside the external cover of the heat chamber and having a plurality of perforated holes; and higher and lower closing plates disposed to close top and bottom of the external cover and the protection cover.</p>
申请公布号 WO2007094609(A1) 申请公布日期 2007.08.23
申请号 WO2007KR00784 申请日期 2007.02.14
申请人 AN, SAE YOUNG 发明人 AN, SAE YOUNG
分类号 H01L21/02 主分类号 H01L21/02
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