ELECTROSTATIC ACTUATOR WITH A FLEXIBLE ELECTRODE

摘要

An electrostatic actuator includes a body (310) having a chamber (312) therein, a first electrode (360) secured to the chamber (312), and a diaphragm (320) mounted to the body. The diaphragm includes a mounting surface portion (322) secured to the body, and a dynamic surface portion (324, 326) for movement within the chamber. The electrostatic actuator also includes a second electrode (370) secured relative to the diaphragm. In some embodiments, the first electrode includes a void therein. In other embodiments, the second electrode includes a void (d) therein. In still other embodiments, both the first and the second electrode include voids therein.