| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve problems caused by a substrate being large in size upon using a large alkali metal-containing glass substrate for a large mask blank for a FPD (flat panel display). <P>SOLUTION: The large alkali metal-containing glass substrate has at least a light shielding film applied on an alkali metal-containing glass substrate in which the alkali metal ion concentration on the substrate surface is lower than the alkali metal ion concentration in the inside part of the substrate. The large mask blank is used for manufacturing an FPD device. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
