DOPING METHOD BY LIGHT IRRADIATION

摘要

PROBLEM TO BE SOLVED: To provide a doping method by light irradiation capable of accelerating the diffusion of palladium to a tin oxide membrane and enhancing the gas response and sensitivity of the tin oxide membrane becoming a gas sensing film as a result. SOLUTION: The surface of the tin oxide membrane formed on a substrate is irradiated with light in the state that a palladium solution is brought into contact with the surface of the tin oxide membrane to diffuse palladium to the tin oxide membrane. The light irradiation is preferably performed using a light source which emits light with a wavelength of an ultraviolet region. Further, the tin oxide membrane provided on the substrate may be immersed in the palladium solution but it is preferable to drop the palladium solution on the surface of the tin oxide membrane. COPYRIGHT: (C)2007,JPO&INPIT