发明名称 |
FLEXIBLE DISPLAY DEVICE HAVING ENHANCED THIN FILM SEMICONDUCTIVE LAYER AND METHOD OF MANUFACTURE |
摘要 |
A manufacturing method for a flat panel display device includes forming a barrier layer on a flexible plastic substrate by RF sputtering, forming an amorphous silicon layer on the plastic substrate, and subjecting the amorphous silicon layer to a rapid heat treatment so as to thereby improve electrical characteristics and/or homogeneity of the amorphous silicon layer.
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申请公布号 |
US2007196576(A1) |
申请公布日期 |
2007.08.23 |
申请号 |
US20070677353 |
申请日期 |
2007.02.21 |
申请人 |
KIM BYOUNG-JUNE;YANG SUNG-HOON;CHOI JAE-HO |
发明人 |
KIM BYOUNG-JUNE;YANG SUNG-HOON;CHOI JAE-HO |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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