GAS EXCITATION DEVICE HAVING INSULATION FILM LAYER CARRYING ELECTRODE AND GAS EXCITATION METHOD

摘要

A gas excitation device includes a housing having a flow-in opening for gas to be processed and a discharge opening for processed gas. In the housing, there is provided at least one pair of electrodes for connection with an AC power source. The pair of electrodes may be a pair of protected electrodes or a pair of a protected electrode and an exposed electrode. At least one protected electrode is formed by a core electrode and an insulation film layer covering the entire surface of the core electrode and carried thereon.