| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an inkjet head with a high productivity, a high yield, and a low cost. SOLUTION: The method for manufacturing the inkjet head using a piezoelectric element is characterized in that after a piezoelectric material substrate 1 in which a plurality of side walls and channels 11 being paths for ink are alternately arranged side by side is plasma-treated, an electrode 6 is formed by vapor deposition without ion irradiation by an ion gun. COPYRIGHT: (C)2007,JPO&INPIT
|
