发明名称 Coaxial imaging for indentation instruments
摘要 Modifications to the indenter probe tips and transducer, and proper selection of optics in an indentation system allow straight down optical viewing of the sample surface under the indentation tip by a microscope, by providing an optical path through the transducer from the sample surface under the tip to a microscope objective, thereby simplifying alignment of the tip to features on the sample.
申请公布号 US2007193346(A1) 申请公布日期 2007.08.23
申请号 US20070708302 申请日期 2007.02.20
申请人 BONIN WAYNE A 发明人 BONIN WAYNE A.
分类号 G01N3/48 主分类号 G01N3/48
代理机构 代理人
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