发明名称 RADIATION-SENSITIVE POSITIVE RESIN COMPOSITION FOR PRODUCING PLATINGS, TRANSFER FILM, AND PROCESS FOR PRODUCING PLATINGS
摘要 A radiation-sensitive positive resin composition is excellent in sensitivity, resolution and adhesion to a substrate and is developed to form clear apertures without residues. The composition does not contaminate a plating solution and is capable of forming a resin film (resist) that is resistant to cracks after plating, resistant to indentation by platings, and resistant to lifting. A transfer film has the composition. A process of the invention produces thick platings as bumps or wirings with high precision. The radiation-sensitive positive resin composition for producing platings includes a polymer (A) that has at least one end terminated with -SR (wherein R is a linear or branched alkyl group of 1 to 20 carbon atoms, a cyclic alkyl group of 3 to 20 carbon atoms, or a derivative thereof) and includes a structural unit having an acid-dissociative functional group which is dissociated by an acid to yield an acidic functional group; a radiation-sensitive acid generator (B); and an organic solvent (C).
申请公布号 US2007196765(A1) 申请公布日期 2007.08.23
申请号 US20070677339 申请日期 2007.02.21
申请人 JSR CORPORATION 发明人 MORI KOUSUKE;NISHIKAWA KOUJI
分类号 G03C1/00 主分类号 G03C1/00
代理机构 代理人
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