发明名称 |
METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER |
摘要 |
<p>In some aspects, a method is provided for abating perf luorocarbons (PFCs) in a gaseous waste abatement system having a pre-installed controlled decomposition oxidation (CDO) thermal reaction chamber. The method that includes (1) providing a catalyst bed within the CDO thermal reaction chamber; and (2) introducing a gaseous waste stream into the CDO thermal reaction chamber so as to expose the gaseous waste stream to the catalyst bed. Numerous other aspects are provided.</p> |
申请公布号 |
WO2007095150(A2) |
申请公布日期 |
2007.08.23 |
申请号 |
WO2007US03638 |
申请日期 |
2007.02.09 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LIN, KUO-CHEN;RAOUX, SEBASTIEN;VERMEULEN, ROBBERT M. |
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