MEASURING PROBE, SAMPLE SURFACE MEASURING APPARATUS AND SAMPLE SURFACE MEASURING METHOD

摘要

A measuring probe (1) for measuring the surface of a sample (S) is composed of a base section (10); a head section (30) whereupon a probe (31) is arranged; and a support structure section (15) for holding the head section (30) to the base section (10) by having, as a supporting axis, an axis substantially orthogonally intersecting a vertical axis from which the probe (31) protrudes. The support structure section (15) is composed of two spring structure sections, i.e., a first spring structure section (20) deformable in the vertical axis direction, and a second spring structure section (25) deformable in the horizontal axis direction. On a side opposite to the probe (31) of the head section (30), a reflecting plane (32) is formed of a reflection pattern which changes to provide different reflectivities within the plane. Thus, the measuring probe for improving accuracy of measuring the sample surface without using a special measuring system, a sample surface measuring apparatus and a sample measuring method are provided.