LIGHT-EMITTING DEVICE, METHOD FOR MANUFACTURING LIGHT-EMITTING DEVICE, AND SUBSTRATE PROCESSING APPARATUS
摘要
<p>Disclosed is a substrate processing apparatus for forming a light-emitting device, wherein an organic layer containing a light-emitting layer is formed between a first electrode and a second electrode, on a substrate to be processed. This substrate processing apparatus is characterized by comprising an organic layer-forming device for forming the organic layer on the first electrode formed on the substrate to be processed, an electrode-forming device for forming the second electrode on the organic layer, and an etching device for etching the organic layer.</p>
申请公布号
WO2007094322(A1)
申请公布日期
2007.08.23
申请号
WO2007JP52521
申请日期
2007.02.13
申请人
TOKYO ELECTRON LIMITED;NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY;NOZAWA, TOSHIHISA;MOYAMA, KAZUKI;OHMI, TADAHIRO;KAWAMURA, CHUICHI;YOSHINO, KIMIHIKO