| 发明名称 |
NORBORNENYLMETHYL FLUOROALKYL ETHERS |
| 摘要 |
<p>New monomers, norbornenylmethyl fluoroalkyl ethers, made by reaction of bicyclo(2,2,1)hept-5-ene-2-methanol with fluoro(alkyl vinyl ethers), are described. These monomers are useful in making polymers such as hydrophobic, hydrolytically-resistant polymers for photoresists, particularly for use in photoimaging by immersion lithography with 193 nm light.</p> |
| 申请公布号 |
WO2007095361(A1) |
申请公布日期 |
2007.08.23 |
| 申请号 |
WO2007US04128 |
申请日期 |
2007.02.13 |
| 申请人 |
E. I. DU PONT DE NEMOURS AND COMPANY;KIPP, BRIAN, EDWARD;SPRAGUE, LEE, G. |
发明人 |
KIPP, BRIAN, EDWARD;SPRAGUE, LEE, G. |
| 分类号 |
C07C43/115;C08G61/12 |
主分类号 |
C07C43/115 |
| 代理机构 |
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