| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique capable of performing a measurement for a calibration automatically, omitting a replacement operation of a standard plate and saving an operator's time, when an eddy current type displacement measuring instrument is conducted the calibration using a plurality of the standard plates having different known thickness consisting of a non-magnetic material. SOLUTION: The system comprises a probe supporting parts 11 holding a probe 12 of the eddy current type displacement measuring instrument, a target supporting part 30 which supports a target 37 to be movable reciprocally to a probe head 12a of the above probe 12, a rotary plate 40 (the standard plate holding part) which has a function moving one by one these standard plates F, F, ..., into a measuring position between the probe head 12a and the target 37, with holding a plurality of the standard plates F, F, ..., as a whole, a holding member support part 20 supporting to be movable reciprocally the rotary plate 40 against the probe head 12a, and a calibration tool 10 which is prepared with the rotary plate 40, the holding member support part 20 and a drive control part 66 controlling the drive of the target supporting part 30. COPYRIGHT: (C)2007,JPO&INPIT
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