| 摘要 |
PROBLEM TO BE SOLVED: To improve cleanliness in a conveying path by surely preventing intrusion of dusts generated from an external wall member and a heater into the conveying path by preventing formation of clearances at joining parts of a plurality of sheets of heat resistance glass disposed as a dust prevention wall. SOLUTION: The plurality of sheets of heat resistance glass 31 of a top face is positioned at an upper part with respect to a top face of an exhaust box. Each heat resistance glass 31 is disposed in such manner that an end portion 31A at a downstream side of the conveying path is overlapped to an upper part of an end portion 31B at an upstream side of another adjacent heat resistance glass 31 at a downstream side. Heat resistance cross seat members can be disposed on the overlapping portions. COPYRIGHT: (C)2007,JPO&INPIT
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