| 摘要 |
PROBLEM TO BE SOLVED: To provide an ejector having chemical substance resistance and water resistance, which is manufactured at a low cost and maintaining high accuracy even under an environment where significant temperature change and vibration are generated. SOLUTION: A main body of the ejector consists of a body B in which a plurality of nozzles 6 to 9 are serially incorporated at intervals and a cover C for covering the body B. The main body has openings including a supply passage 13 for supplying compressed air, an exhaust passage 14 for exhausting the supplied air and a sucking passage 15 for connecting a sucking means for sucking a chamber or a work which should be vacuumed. In the ejector, the body B is made of resin and expansion inhibition members 21, 22 for inhibiting expansion and contraction of the body B is provided along a longitudinal direction of the nozzles 6 to 9. COPYRIGHT: (C)2007,JPO&INPIT
|
