摘要 |
This invention provides an internal stress actuated micro- or nano- machine for measuring mechanical and/or electrical properties, e.g. traction measurement, compression measurement or shear measurement, on micro- scale and nano-scale films or multi-layers of materials such as metallic materials, carbon-based materials and silicon-base materials. The device of the invention has applications in materials production industry, as well as in micro-electronics and for surface treatments and functionalization. |
申请人 |
UNIVERSITE CATHOLIQUE DE LOUVAIN;PARDOEN, THOMAS;FABREGUE, DAMIEN;RASKIN, JEAN-PIERRE;ANDRE, NICOLAS;COULOMBIER, MICHAEL |
发明人 |
PARDOEN, THOMAS;FABREGUE, DAMIEN;RASKIN, JEAN-PIERRE;ANDRE, NICOLAS;COULOMBIER, MICHAEL |