APPARATUS AND METHOD FOR THE UNIFORM COATING OF SUBSTRATES

摘要

The surface of a substrate (10) can be uniformly covered with a liquid if the substrate is fixed in a holding device (12a, 12b), which together with the surface of the substrate forms a process volume into which the liquid ca n be introduced onto the surface of the substrate by means of a wetting devi ce (14, 50), and if the holding device with the substrate is set in a tumbli ng movement by means of a tumbling device (18a-18c), so that the liquid is u niformly distributed on the surface of the substrate.