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发明名称
摘要
申请公布号	JP3963078(B2)	申请公布日期	2007.08.22
申请号	JP20000404625	申请日期	2000.12.25
申请人		发明人
分类号	C07F9/00;C23C16/34;H01L21/205;H01L21/28;H01L21/3205	主分类号	C07F9/00
代理机构		代理人
主权项
地址

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