发明名称 |
METHOD AND DEVICE FOR FLATTENING SURFACE OF SOLID |
摘要 |
In a method of irradiating a gas cluster ion beam on a solid surface and smoothing the solid surface, the angle formed between the solid surface and the gas cluster ion beam is chosen to be between 1° and an angle less than 30°. In case the solid surface is relatively rough, the processing efficiency is raised by first irradiating a beam at an irradiation angle ¸ chosen to be something like 90° as a first step, and subsequently at an irradiation angle ¸ chosen to be 1° to less than 30° as a second step. Alternatively, the set of the aforementioned first step and second step is repeated several times. |
申请公布号 |
EP1670048(A4) |
申请公布日期 |
2007.08.22 |
申请号 |
EP20040788341 |
申请日期 |
2004.09.29 |
申请人 |
JAPAN AVIATION ELECTRONICS INDUSTRY, LIMITED |
发明人 |
SATO, AKINOBU;SUZUKI, AKIKO;BOURELLE, EMMANUEL;MATSUO, JIRO;SEKI, TOSHIO;AOKI, TAKAAKI |
分类号 |
H01L21/3065;C23F4/00;H01J37/305 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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