Plasma processing system and method for delivering RF power to a plasma processing chamber,申请号EP20000948512-传众专利搜索

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发明名称	Plasma processing system and method for delivering RF power to a plasma processing chamber
摘要
申请公布号	EP1190437(B1)	申请公布日期	2007.08.22
申请号	EP20000948512	申请日期	2000.06.15
申请人	LAM RESEARCH CORPORATION	发明人	FISCHER, ANDREAS;KADKHODAYAN, BABAK;KUTHI, ANDRAS
分类号	H01L21/3065;H01J37/32;H01L21/205;H01L21/302	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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