TRANSMITTING OPTICAL ELEMENT AND OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS,申请号EP20050824575-传众专利搜索

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发明名称	TRANSMITTING OPTICAL ELEMENT AND OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
摘要
申请公布号	EP1820050(A1)	申请公布日期	2007.08.22
申请号	EP20050824575	申请日期	2005.12.08
申请人	CARL ZEISS SMT AG	发明人	CLAUSS, WILFRIED;TOTZECK, MICHAEL;MUELLER-RISSMANN, WERNER
分类号	G02B1/02;C04B35/443;G03F7/20	主分类号	G02B1/02
代理机构		代理人
主权项
地址

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