| 摘要 |
A plasma generation apparatus and a work process apparatus are provided to irradiate plasma to a work by monitoring the state of a plasma generation nozzle. A plasma generation apparatus includes a micro wave generating unit, a gas supplying unit, a plasma generation nozzle, and a light detection unit. The micro wave generating unit generates micro waves. The gas supplying unit supplies gas to be changed into plasma. The plasma generation nozzle includes a central conductor(32) as an internal electrode, a nozzle body(33) as an external electrode, a nozzle holder(34), a sealing member, and a protecting pipe. The central conductor(32) is made of a metal having high conductivity such as copper, aluminum, and steel. An upper end of the central conductor(32) penetrates a lower surface plate(13B) of a third waveguide piece(13) to be protruded to a waveguide space by a predetermined length. A lower end(322) of the central conductor(32) is arranged vertically so that the height of the lower end(322) is the same as the height of a lower end edge(331) of the nozzle body(33). The nozzle body(33) is made of a metal having high conductivity, and has a tubular space(332) for receiving the central conductor(32). |
