METHOD FOR PRODUCING FOR THE MICROLENS MOLD

摘要

A method for producing a microlens mold is provided to produce an aspheric microlens having a diameter of 1mm or less and a thickness of 0.3mm or greater. A method for producing a microlens mold includes a step of forming a second mask layer(3) on a silicon substrate(1) such that the mask layer surrounds a circular region having a diameter less than a recess of the mold, and forming a first mask layer(2) having a plurality of openings(4) on the circular region; a step of forming a plurality of holes(5) on the silicon substrate by performing anisotropic dry etching on the silicon substrate in the circular region through the openings; a step of removing side walls of the holes and merging the holes by performing isotropic etching on the silicon substrate in the circular region through the openings; and a step of removing the first mask layer, enlarging the recess and making a surface smooth by performing isotropic etching on a recess formed by merging of the holes through the circular region of the second mask layer, and removing the second mask layer.