半导体制造用静电卡盘用吸盘,申请号CN200530166172.8-传众专利搜索

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发明名称	半导体制造用静电卡盘用吸盘
摘要
申请公布号	CN3682345D	申请公布日期	2007.08.22
申请号	CN200530166172.8	申请日期	2005.11.24
申请人	东京毅力科创株式会社	发明人	林大辅
分类号	15-99	主分类号	15-99
代理机构	北京纪凯知识产权代理有限公司	代理人	龙淳
主权项
地址	日本国东京都

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