发明名称 |
Method of manufacturing thin film transistor array panel and liquid crystal display |
摘要 |
A method of manufacturing a thin film transistor array panel is provided, which includes: forming a gate line including a gate electrode on a substrate; depositing a gate insulating layer; forming a semiconductor layer on the gate insulating layer; forming an ohmic contact layer on the semiconductor layer; forming a data line including a source electrode and a drain electrode on the ohmic contact layer at least in part; forming an alignment key including the same layer as the data line; coating a first photosensitive film for a color filter; aligning a mask for color filter with the substrate provided with the first photosensitive film using the alignment key; forming a first color filter by light exposure and developing the first photosensitive film; and forming a pixel electrode connected to the drain electrode.
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申请公布号 |
US7259807(B2) |
申请公布日期 |
2007.08.21 |
申请号 |
US20040877590 |
申请日期 |
2004.06.25 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM DONG-GYU |
分类号 |
G02F1/136;G02F1/1368;G02F1/1333;G02F1/1362;H01L21/336;H01L29/786 |
主分类号 |
G02F1/136 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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