发明名称 Producing method for solid-state image pickup device including formation of a carrier accumulating region
摘要 The invention is to simplify a producing process for a solid-state image pickup device having pixels including MOS transistors, thereby improving productivity of the image pickup device. In a producing method for a solid-state image pickup device including pixels 100 each including a photoelectric conversion region 101 for generating photoelectrically a carrier and accumulating the carrier photoelectrically generated, a carrier accumulating portion 102 for accumulating a carrier overflowing from the photoelectric conversion region 101 in a period of carrier generation and accumulation thereof, and a MOS transistor Tx-MOS for transferring the carrier overflowing from the photoelectric conversion region 101 , wherein a gate electrode of the MOS transistor Tx-MOS is formed in the same step as the step of forming a polysilicon film 118 constituting the first electroconductive film of the carrier accumulating portion 102.
申请公布号 US7259361(B2) 申请公布日期 2007.08.21
申请号 US20060368511 申请日期 2006.03.07
申请人 CANON KABUSHIKI KAISHA 发明人 NISHIMURA SHIGERU
分类号 H01L27/00;H01L27/146;H04N5/335;H04N5/369;H04N5/374 主分类号 H01L27/00
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