发明名称 |
MEMS device with thinned comb fingers |
摘要 |
Methods of fabricating thinned comb MEMS devices are disclosed. A comb drive device in accordance with an illustrative embodiment of the present invention can include a number of interdigitated comb fingers some of which have a reduced thickness along at least a portion of their length relative to other comb fingers.
|
申请公布号 |
US7258010(B2) |
申请公布日期 |
2007.08.21 |
申请号 |
US20050076193 |
申请日期 |
2005.03.09 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
HORNING ROBERT D.;WEBER MARK W.;JOHNSON BURGESS R. |
分类号 |
G01P15/125;G01P9/04 |
主分类号 |
G01P15/125 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|