发明名称 Semiconductor device using SOI structure having a triple-well region
摘要 A semiconductor device includes a support substrate, a buried insulation film, provided on the support substrate, having a thickness of 5 to 10 nm, a silicon layer provided on the buried insulation film, a MOSFET provided in the silicon layer, and a triple-well region provided in the support substrate under the MOSFET.
申请公布号 US7259428(B2) 申请公布日期 2007.08.21
申请号 US20050097387 申请日期 2005.04.04
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 INABA SATOSHI
分类号 H01L27/01;H01L27/12;H01L29/00;H01L29/167;H01L31/0392 主分类号 H01L27/01
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