发明名称 Method of making a microelectronic and/or optoelectronic circuitry sheet
摘要 A circuitry sheet ( 322 ) comprising an electronic device layer stack ( 304 ) containing electronic devices, e.g., thin-film transistors, or portions thereof, formed by removing material from both sides of the device layer stack. The circuitry sheet may be made by an electronic/optoelectronic device manufacturing method ( 200 ) that includes the steps of forming the device layer stack on a temporary substrate ( 300 ), removing material from both sides of the device layer stack, and then attaching a permanent substrate ( 348 ) to the device layer stack. The method uses one or more resist layers ( 600 ) that may be activated simultaneously and independently to impart distinct circuit pattern images ( 603, 608, 612 ) into each of a plurality of image levels ( 612, 616, 620 ) within each resist layer, thereby obviating repetitive sequential exposure, registration and alignment steps.
申请公布号 US7259106(B2) 申请公布日期 2007.08.21
申请号 US20050223515 申请日期 2005.09.09
申请人 VERSATILIS LLC 发明人 JAIN AJAYKUMAR R.
分类号 H01L21/027 主分类号 H01L21/027
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