| 摘要 |
A fine metal mask is provided to prevent the deformation of a transparent region by uniformly dispersing a tensile force applied on the transparent region during an implementation of a frame. A vaporization source(130) and a board to be processed(120) are arranged in a vacuum chamber(110). The vaporization source includes a furnace and an electric heater wound around an outer periphery of the furnace. An organic material is condensed in the furnace. A first electrode is patterned on the board to be processed. A vacuum ventilator is connected to the vacuum chamber. A fine metal mask is arranged on one surface of the board to be processed. The board to be processed and the fine metal mask are attached to each other by using a board fixing unit(122). |
