SEMICONDUCTOR EMITTING DEVICE WITH NANO PATTERN STRUCTURE AND MANUFACTURING METHOD FOR THE SAME

摘要

A semiconductor light emitting device and a manufacturing method thereof are provided to reduce screw dislocation in the manufacturing process by inserting a nano pattern into a semiconductor layer. A semiconductor light emitting device includes a semiconductor layer having plural nano patterns(23), and an active layer(25) formed on the semiconductor layer. The semiconductor layer has a first semiconductor layer(22) on which the nano patterns are formed, a second semiconductor layer(24) formed on a region of the first semiconductor layer on which the nano patterns are formed, and a third semiconductor layer formed on the active layer.