发明名称 METHOD FOR FABRICATING THIN FILM TRANSISTOR PANEL AND THIN FILM TRANSISTOR PANEL FABRICATED BY THE SAME
摘要 <p>A method for fabricating a thin film transistor panel and the thin film transistor panel fabricated by the same are provided to increase exposure sensitivity by thinning a thickness of a photoresist layer, thereby improving the productivity. An amorphous silicon layer is patterned by using a photoresist pattern formed on an insulation substrate(10) an etch mask to form a semiconductor layer(44). A transparent conductive layer is formed on a gate insulating layer(30) or the photoresist pattern, and then the photoresist pattern is removed to form a pixel electrode(75). A data wiring is formed to be electrically connected to the pixel electrode. A protective layer(90) having an opening(92) exposing the pixel electrode is formed.</p>
申请公布号 KR20070081900(A) 申请公布日期 2007.08.20
申请号 KR20060014171 申请日期 2006.02.14
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 JEON, WOO SEOK
分类号 H01L29/786 主分类号 H01L29/786
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