ROBOT FOR TRANSPORTING SUBSTRATE AND EQUIPMENT FOR CLEANING SUBSTRATES HAVING THE ROBOT

摘要

A substrate transfer robot and substrate cleaning equipment with the same are provided to prevent the re-contamination of substrates after a cleaning process by supporting the substrates at different positions using an improved blade with a first support member and a second support member. A substrate transfer robot includes a blade. The blade(126) includes a first support member and a second support member. The first support member(128) supports substrates before a substrate cleaning process. A front end portion of the first support member is inclined. The second support member(129) supports the substrates after the substrate cleaning process. A rear end portion of the second support member is inclined. The first support member is composed of a first support pins for supporting the front end portion of the substrate and a second support pins for supporting the rear end portion of the substrate. The height of the second support pin is larger than that of the first support pin. The second support member is composed of third support pins for supporting the front end portion of the substrate at a higher portion than the first support pin and forth support pins for supporting the rear end portion of the substrate at a lower portion than the second support pin.