| 摘要 |
A semiconductor manufacturing system for monitoring a standard process time is provided to access easily productivity data per each semiconductor substrate, each lot or each process unit by displaying the standard process time of the substrate as well as a processing position of the substrate in real time using a display unit. A semiconductor manufacturing system for monitoring a standard process time includes a process equipment unit, a control unit and a display unit. The process equipment unit(110) for processing a plurality of semiconductor substrates. The control unit(120) controls the plurality of semiconductor substrates of the process equipment unit and calculates a standard process time for each semiconductor substrate. The display unit(130) is composed of a first display part and a second display part. The first display part displays the position of each semiconductor substrate of the process equipment unit. The second display part displays the standard process time of each semiconductor substrate.
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