VARIABLE SLIT DEVICE, LIGHTING DEVICE, ALIGNER, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To suppress an increase of number of blades and correct uneven illuminance.

SOLUTION: The variable slit device regulates a lighting light EL formed by an optical element like a slit, and it is provided with a first light shield 10 that has a plurality of blades 30 to regulate one long side of the lighting light EL, and a second light shield 20 to regulate the other long side thereof. A contour shape to regulate a long side of the second light shield 20 is set according to the intrinsic characteristic of an optical element.

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