| 摘要 |
PROBLEM TO BE SOLVED: To prevent a wafer from extruding in the state where any empty wafer carrier is not set, and thereby to prevent a damage or the like of the wafer from occurring to improve a yield, and moreover to raise a working efficiency. SOLUTION: There is provided a slide 13 equipped with a carrier guide for installing two wafer carriers 17 side by side so as to be able to slide on a seating 11. There is provided a safety device which can move other wafer carriers by sliding the slide 13 and by simultaneously pushing a semiconductor wafer by a pushing board 19, and makes it possible not to move the slide 13 when other wafer carriers are not installed. COPYRIGHT: (C)2007,JPO&INPIT |
