| 摘要 |
PROBLEM TO BE SOLVED: To provide an integrated circuit which can improve yield and reliability. SOLUTION: The integrated circuit 100 is provided with a semi-insulating semiconductor substrate 11; an insulating film 12 formed on the semi-insulating substrate 11; and a capacitor that is comprised of a lower electrode 14 formed on the insulating film 12, an insulating film 15 formed on the lower electrode 14, and an upper electrode 16 formed on the insulating film 15. In this case, a connection part 20 for the lower electrode 14 and the semi-insulating semiconductor substrate 11 is provided so that the lower electrode 14 and the semi-insulating semiconductor substrate 11 may be in contact with each other. COPYRIGHT: (C)2007,JPO&INPIT
|
