CHARGED-PARTICLE BEAM MICROSCOPE, IMAGE FORMATION METHOD, AND COMPUTER FOR EVALUATING IMAGE RESOLUTION

摘要

PROBLEM TO BE SOLVED: To provide an image evaluation method capable of evaluating the image resolution of a microscope image objectively. SOLUTION: In the image evaluation method, resolution in partial regions of an image is obtained over an entire area of the image or a portion of the image, averaging is performed over the entire area of the image or the portion of the image, and the averaged value is established as the resolution evaluation value of the entire area of the image or the portion of the image. This method eliminates the subjective impressions of the evaluator from evaluation of microscope image resolution, so image resolution evaluation values of high precision and good repeatability can be obtained for the evaluation value of the image resolution. COPYRIGHT: (C)2007,JPO&INPIT