发明名称 Method for making a perpendicular magnetic recording disk
摘要 A method for making a perpendicular magnetic recording disk that has a hexagonal-close-packed (hcp) granular cobalt alloy recording layer (RL) containing an additive oxide or oxides grown on an a hcp intermediate layer (IL) involves roughening the surface of the IL. The IL, which is typically hcp Ru or Ru alloy, is deposited at substantially lower sputtering pressure than in the prior art, which results in less of a columnar structure for the IL and a smoother IL surface. The relatively smooth surface of the IL is then modified with ion bombardment, such as by sputter etching in Ar, to provide a "nano-roughed" surface onto which the RL is grown. The roughened surface of the IL promotes the grain segregation in the RL as the RL grows. However, because the IL has less of a columnar structure there are fewer pathways for water and corrosive agents.
申请公布号 US2007187227(A1) 申请公布日期 2007.08.16
申请号 US20060354505 申请日期 2006.02.15
申请人 发明人 MARINERO ERNESTO E.
分类号 C23C14/00 主分类号 C23C14/00
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