发明名称 Devices including graphene layers epitaxially grown on single crystal substrates
摘要 An electronic device comprises a body including a single crystal region on a major surface of the body. The single crystal region has a hexagonal crystal lattice that is substantially lattice-matched to graphene, and a at least one epitaxial layer of graphene is disposed on the single crystal region. In a currently preferred embodiment, the single crystal region comprises multilayered hexagonal BN. A method of making such an electronic device comprises the steps of: (a) providing a body including a single crystal region on a major surface of the body. The single crystal region has a hexagonal crystal lattice that is substantially lattice-matched to graphene, and (b) epitaxially forming a at least one graphene layer on that region. In a currently preferred embodiment, step (a) further includes the steps of (a 1 ) providing a single crystal substrate of graphite and (a 2 ) epitaxially forming multilayered single crystal hexagonal BN on the substrate. The hexagonal BN layer has a surface region substantially lattice-matched to graphene, and step (b) includes epitaxially forming at least one graphene layer on the surface region of the hexagonal BN layer. Applications to FETs are described.
申请公布号 US2007187694(A1) 申请公布日期 2007.08.16
申请号 US20060355360 申请日期 2006.02.16
申请人 PFEIFFER LOREN N 发明人 PFEIFFER LOREN N.
分类号 H01L29/15 主分类号 H01L29/15
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