| 摘要 |
PROBLEM TO BE SOLVED: To provide substrate transport apparatus and method in which the position of the substrate can be adjusted surely with high precision, and the time required for moving the substrate and adjusting the position thereof can be shortened. SOLUTION: A substrate 2 onto which an alignment mark 3 is put is moved from a carry-in position toward a processing position by a moving stage 5, and a first region of the substrate 2 including the alignment mark 3 is imaged at a first magnification by each imaging section 6 for rough adjustment. An operation processing section 9 measures a first correction amount based on the image of the first region and adjusts the position of the substrate 2 depending on the first correction amount during movement of the substrate 2. After the substrate 2 arrives at the processing position, each imaging section 7 for fine adjustment images a second region of the substrate 2 including the alignment mark 3 and narrower than the first region at a second magnification higher than the first magnification. The operation processing section 9 measures a second correction amount based on the image of the second region and adjusts the position of the substrate 2 depending on the second correction amount. COPYRIGHT: (C)2007,JPO&INPIT |
