| 摘要 |
PROBLEM TO BE SOLVED: To analyze an inspection target related to an element or molecule distribution by X rays. SOLUTION: X rays (1) having a determined energy spectrum are produced by an X-ray source, the standing wave field (4) of these X rays (1) is formed by at least one X-ray optical lattice (2) in the beam path of X rays (1), this X-ray standing wave field (4) is at least partially positioned within the inspection target (5), the radiation (6) excited by the X-ray standing wave field (4) in the inspection target (5) is measured in dependence on at least one relative position between the inspection target (5) and the X-ray standing wave field (4) and the substance distribution (5. x) in the inspection target (5) is estimated from the measuring result of the radiation (6) excited by the X-ray standing wave field (4). COPYRIGHT: (C)2007,JPO&INPIT
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