| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method for a disk and the disk cleaning system capable of choosing a cleaning sequence according to the kind of the disks or degree of dirtiness, and capable of decreasing the number of the disks to be cleaned again. SOLUTION: A line of a shower cleaning bath or a brush cleaning bath, a first chemical cleaning bath, a second chemical cleaning bath, a pure water cleaning bath, and a drying room is arranged in this sequence. A disk transfer robot, for moving forward and backward along the line, is arranged at the upper part for each of these cleaning baths. A surface inspection device is arranged as a post-process for the drying room, and the sequence of each of the cleaning baths is changed according to foreign substance inspection result from the surface inspection device. A cleaning sequence, in which the optimal inspection result is obtained in the surface inspection device, is obtained, and the succeeding disks are cleansed with the sequence. COPYRIGHT: (C)2007,JPO&INPIT
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