Magnetischer Dünnfilm und denselben verwendende magnetische Vorrichtung

摘要

The present invention provides a soft magnetic thin film having high reliability that is useful in a magnetic device such as a magnetic head, where the degradation of heat stability due to a high saturation magnetic flux density of the soft magnetic thin film, the degradation of resistance against surroundings and substrate breakage are suppressed. The magnetic thin film of the present invention comprises a magnetic film comprising approximately columnar, needle or branched magnetic crystal grains as a mother phase, which is formed by sputtering or the like. The magnetic crystal grains have an average maximum length more than 50 nm, and an average crystal size in a short direction of the approximately columnar or needle shape is more than 5 nm and less than 60 nm.