发明名称 POLYAMIC ACID ESTER COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive polyamic acid ester composition capable of shortening processing time in a development step in the production of a relief pattern and having high resolution and storage stability. <P>SOLUTION: The photosensitive resin composition comprises (a) 100 pts.mass of a polyamic acid ester having a repeating unit represented by formula (1), (b) 1-20 pts.mass of a photopolymerization initiator and (c) 30-600 pts.mass of an organic solvent, wherein a content of N-ethyl-2-pyrrolidone and/or 1,3-dimethyl-2-imidazolidinone in the organic solvent is &ge;50 mass% of the total amount of the organic solvent. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007206423(A) 申请公布日期 2007.08.16
申请号 JP20060025753 申请日期 2006.02.02
申请人 ASAHI KASEI ELECTRONICS CO LTD 发明人 YAMAMOTO RIEKO
分类号 G03F7/027;C08F290/14;G03F7/004;H01L21/027 主分类号 G03F7/027
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