发明名称 METHOD AND APPARATUS FOR MANUFACTURING ORGANIC ELECTROLUMINESCENCE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing an organic electroluminescence device which can achieve a long service life of the organic electroluminescence device. SOLUTION: The method for manufacturing the organic electroluminescence device comprises: a first step for forming an organic layer on a substrate, a second step for heating the organic layer formed on the substrate in an inert gas atmosphere, and a third step for irradiating the organic layer formed on the substrate 1 with a microwave in a predetermined atmosphere. The third step is performed at least before or after the second step. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007207546(A) 申请公布日期 2007.08.16
申请号 JP20060024169 申请日期 2006.02.01
申请人 SEIKO EPSON CORP 发明人 UCHIDA MASAHIRO
分类号 H05B33/10;H01L51/50 主分类号 H05B33/10
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