| 摘要 |
PROBLEM TO BE SOLVED: To provide a table device which can excellently reflects the accuracy of a setting surface to a table, can cope with a precise movement control even if an inexpensive driving mechanism is employed, and is extremely excellent in practical utility. SOLUTION: The table device is provided with the table 2 on which a workpiece 1 is mounted, and the table is set on the setting surface 3. The table device is formed of: the driving mechanism 4 for driving the table 2 in a predetermined direction; a first oscillation absorbing mechanism 6 for absorbing rolling occurring at the table 2 due to driving by the driving mechanism 4; a second oscillation absorbing mechanism 7 for absorbing pitching occurring at the table 2 due to the driving by the driving mechanism 4; and a vertical motion absorbing mechanism 8 for absorbing vertical motion occurring at the table 2 due to the driving by the driving mechanism 4. COPYRIGHT: (C)2007,JPO&INPIT
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