| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a polymer giving a film having small relative dielectric constant, excellent mechanical strength and adhesiveness and uniform film quality while reducing the quantity of a metallic reaction agent and suppressing the generation of by-product to be removed and provide the polymer, a composition for forming an insulation film, a method for producing an insulation film and a silica-based insulation film. SOLUTION: The method for the production of the polymer contains the hydrolytic condensation of (B) a silane monomer having a hydrolyzable group in the presence of (A) a polycarbosilane, wherein the polycarbosilane (A) is particularly defined polymer (I) or polymer (II). COPYRIGHT: (C)2007,JPO&INPIT
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